| Model LTP90 | -50-SM | -120-SM | -150-SM | -200-SM | -300-SM | |
| Travel | [mm] | 50 | 120 | 150 | 200 | 300 |
| Repeatability unidirectional | [μm] | ± 2.3 | ± 2.3 | ± 2.3 | ± 2.3 | ± 2.3 |
| Repeatability bidirectional | [μm] | ± 3.3 | ± 3.3 | ± 3.3 | ± 3.3 | ± 3.3 |
| Accuracy | [μm] | ± 6.5 | ± 9.8 | ± 11.1 | ± 13.2 | ± 17.4 |
| Flatness | [μm] | ± 2.5 | ± 6 | ± 7.5 | ± 10 | ± 15 |
| Straightness | [μm] | ± 2.5 | ± 6 | ± 7.5 | ± 10 | ± 15 |
| Positioning speed | [mm/s] | 13 | 13 | 13 | 13 | 13 |
| Max. acceleration | [m/s2] | 0.3 | 0.3 | 0.3 | 0.3 | 0.3 |
| Max. load Fx | [N] | 45 | 45 | 45 | 45 | 45 |
| Max. load Fy | [N] | 40 | 40 | 40 | 40 | 40 |
| Max. load Fz | [N] | 40 | 40 | 40 | 40 | 40 |
| Max. torque Mx | [Nm] | 1.4 | 1.4 | 1.4 | 1.4 | 1.4 |
| Max. torque My | [Nm] | 1.5 | 1.5 | 1.5 | 1.5 | 1.5 |
| Max. torque Mz | [Nm] | 1.4 | 1.4 | 1.4 | 1.4 | 1.4 |
| Pitch | [µrad] | ± 25 | ± 40 | ± 45 | ± 50 | ± 60 |
| Yaw | [µrad] | ± 25 | ± 40 | ± 45 | ± 50 | ± 60 |
| Resolution | [µm] | 0.625 | 0.625 | 0.625 | 0.625 | 0.625 |